The operation of air conditioners is essential to provide a comfortable working environment in clean rooms. Before bringing outside air into the air conditioner, the outside air conditioner processes the incoming air from the outside and sends it to the air conditioner to reduce the load on the air conditioner, which not only protects the equipment, but also contributes to energy-saving. Purified water flows into the air washer of the external regulator to humidify the air. The amount of purified water received was reduced by checking the humidity in the clean room and adjusting the supply water by throttling it with a valve.
Annual reduction amount: 2,383 m3/year