MOSFET Performance Improvement: Super-Junction MOSFETs (SJ-MOS)

(1) SJ-MOS has pillar-shaped P layer (P pillar layer) in N layer. P and N layers are aligned alternately. (See Fig. 3-9(b).)
(2) Depletion layer spreads in N- layer by applying VDS, but the way it spreads in SJ-MOS is different from the case of general D-MOS. (See Fig. 3-9(a)/(b) for electric field intensity. Electric field intensity indicates the status of depletion layer.)
(3) In the case of D-MOS the electric field intensity is the strongest at P/N- layer interface. When the electric field intensity exceeds the limit of silicon, break-over phenomenon (breakdown phenomenon) occurs, and this is the voltage limit. On the other hand, in the case of SJ-MOS, the electric field intensity is uniform in N layer.
(4) As a result, SJ-MOS can be designed with N layer that has lower resistance, realizing low-ON-resistance products.
SJ-MOS can realize lower ON resistance with the same size chip as DMOS.

Structure and electric field of D-MOS (π-MOS)
Fig. 3-9(a) Structure and electric field of D-MOS (π-MOS)
Structure and electric field of SJ-MOS (DTMOS)
Fig. 3-9(b) Structure and electric field of SJ-MOS (DTMOS)

Chapter III : Transistors

Types of Transistors
Bipolar Transistors (BJTs)
Bias Resistor Built-in Transistors (BRTs)
Junction Field-Effect Transistors (JFETs)
Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs)
Differences between BJT and MOSFET
Structure and Operation of MOSFET
MOSFET Performance Improvement: Decision Factors of RDS(ON)
MOSFET Performance Improvement: Approach to Low RDS(ON)
Summary of MOSFET Features by Structure
Performance of MOSFETs: Drain Current and Power Dissipation
Performance of MOSFETs: Avalanche Capability
Performance of MOSFETs: Characteristic of Capacitance
Performance of MOSFETs: Safe Operating Area(or Area of Safe Operation)
Insulated-Gate Bipolar Transistors (IGBTs)
Operation of Insulated-Gate Bipolar Transistors (IGBTs)
Performance Improvement of IGBTs: Evolution of Vertical Design
What are RC-IGBTs and IEGTs?
Application of IGBTs
Comparison of Forward Characteristics of IGBTs and MOSFETs
Comparison of Transistors by Structure
Datasheets of MOSFET: Maximum Ratings
Datasheets of MOSFET: Electrical Characteristics
Datasheets of MOSFET: Capacitance and Switching Characteristics
Datasheets of MOSFET: Body Diode

Related information