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Chapter III : Transistors : MOSFET Performance Improvement: Approach to Low RDS(ON)

We are pursuing the following countermeasures for the biggest problem of MOSFET: ”How to effectively reduce on-resistance by effectively utilizing the element area“

(1) High voltage: Reduce resistance of Rdrift by the advanced super-junction process explained on the next page.
(2) Low voltage: Minimize resistance of Rch by fine patterning of trench structure and reduce resistance of Rsub by thinning wafer

Summary of approach to low ON resistance
Factors for ON resistance of MOSFET
Fig. 3-8 Factors for ON resistance of MOSFET

Chapter III : Transistors

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